10/10/2012	10:21:07 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
10/10/2012	10:21:08 AM	Recipe started at 10:21 AM
10/10/2012	10:21:08 AM	Helium valve closed
10/10/2012	10:21:08 AM	H2 valve closed
10/10/2012	10:21:08 AM	BCl3 valve closed
10/10/2012	10:21:08 AM	PH3 valve closed
10/10/2012	10:21:08 AM	SiCl4 pre valve closed
10/10/2012	10:21:08 AM	SiCl4 post valve closed
10/10/2012	10:21:08 AM	Main Vac valve closed
10/10/2012	10:21:08 AM	Bypass valve closed
10/10/2012	10:21:08 AM	Bubbler valve closed
10/10/2012	10:21:08 AM	Helium MFC set to  0.000000
10/10/2012	10:21:08 AM	H2 MFC set to  0.000000
10/10/2012	10:21:08 AM	BCl3 MFC set to  0.000000
10/10/2012	10:21:08 AM	PH3 MFC set to  0.000000
10/10/2012	10:21:08 AM	SiCl4 MFC set to  0.000000
10/10/2012	10:21:08 AM	Bypass solenoid MFC set to  0.000000
10/10/2012	10:21:08 AM	Tube furnace set to 0
10/10/2012	10:21:12 AM	H2 valve closed
10/10/2012	10:21:12 AM	BCl3 valve closed
10/10/2012	10:21:12 AM	PH3 valve closed
10/10/2012	10:21:12 AM	SiCl4 pre valve closed
10/10/2012	10:21:12 AM	SiCl4 post valve closed
10/10/2012	10:21:12 AM	Main Vac valve closed
10/10/2012	10:21:12 AM	Bypass valve closed
10/10/2012	10:21:12 AM	Bubbler valve closed
10/10/2012	10:21:12 AM	Helium valve opened
10/10/2012	10:21:12 AM	Helium MFC set to  500.000000
10/10/2012	10:21:12 AM	H2 MFC set to  0.000000
10/10/2012	10:21:12 AM	BCl3 MFC set to  0.000000
10/10/2012	10:21:12 AM	PH3 MFC set to  0.000000
10/10/2012	10:21:12 AM	SiCl4 MFC set to  0.000000
10/10/2012	10:21:12 AM	Bypass solenoid MFC set to  0.000000
10/10/2012	10:21:12 AM	Tube furnace set to 0
10/10/2012	10:22:21 AM	Helium valve closed
10/10/2012	10:22:21 AM	H2 valve closed
10/10/2012	10:22:21 AM	BCl3 valve closed
10/10/2012	10:22:21 AM	PH3 valve closed
10/10/2012	10:22:21 AM	SiCl4 pre valve closed
10/10/2012	10:22:21 AM	SiCl4 post valve closed
10/10/2012	10:22:21 AM	Main Vac valve closed
10/10/2012	10:22:21 AM	Bypass valve closed
10/10/2012	10:22:21 AM	Bubbler valve closed
10/10/2012	10:22:21 AM	Helium MFC set to  0.000000
10/10/2012	10:22:21 AM	H2 MFC set to  0.000000
10/10/2012	10:22:21 AM	BCl3 MFC set to  0.000000
10/10/2012	10:22:21 AM	PH3 MFC set to  0.000000
10/10/2012	10:22:21 AM	SiCl4 MFC set to  0.000000
10/10/2012	10:22:21 AM	Bypass solenoid MFC set to  0.000000
10/10/2012	10:22:21 AM	Tube furnace set to 0
10/10/2012	10:22:22 AM	Run finished at 10:22 AM
10/10/2012	10:22:22 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
10/10/2012	10:25:26 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
10/10/2012	10:25:27 AM	Recipe started at 10:25 AM
10/10/2012	10:25:27 AM	Helium valve closed
10/10/2012	10:25:27 AM	H2 valve closed
10/10/2012	10:25:27 AM	BCl3 valve closed
10/10/2012	10:25:27 AM	PH3 valve closed
10/10/2012	10:25:27 AM	SiCl4 pre valve closed
10/10/2012	10:25:27 AM	SiCl4 post valve closed
10/10/2012	10:25:27 AM	Main Vac valve closed
10/10/2012	10:25:27 AM	Bubbler valve closed
10/10/2012	10:25:27 AM	Bypass valve opened
10/10/2012	10:25:27 AM	Helium MFC set to  0.000000
10/10/2012	10:25:27 AM	H2 MFC set to  0.000000
10/10/2012	10:25:27 AM	BCl3 MFC set to  0.000000
10/10/2012	10:25:27 AM	PH3 MFC set to  0.000000
10/10/2012	10:25:27 AM	SiCl4 MFC set to  0.000000
10/10/2012	10:25:27 AM	Bypass solenoid MFC set to  0.000000
10/10/2012	10:25:28 AM	Tube furnace set to 0
10/10/2012	10:27:18 AM	Helium valve closed
10/10/2012	10:27:18 AM	H2 valve closed
10/10/2012	10:27:18 AM	BCl3 valve closed
10/10/2012	10:27:18 AM	PH3 valve closed
10/10/2012	10:27:18 AM	SiCl4 pre valve closed
10/10/2012	10:27:18 AM	SiCl4 post valve closed
10/10/2012	10:27:18 AM	Main Vac valve closed
10/10/2012	10:27:18 AM	Bubbler valve closed
10/10/2012	10:27:18 AM	Bypass valve opened
10/10/2012	10:27:18 AM	Helium MFC set to  0.000000
10/10/2012	10:27:18 AM	H2 MFC set to  0.000000
10/10/2012	10:27:18 AM	BCl3 MFC set to  0.000000
10/10/2012	10:27:18 AM	PH3 MFC set to  0.000000
10/10/2012	10:27:18 AM	SiCl4 MFC set to  0.000000
10/10/2012	10:27:18 AM	Bypass solenoid MFC set to  0.000000
10/10/2012	10:27:18 AM	Tube furnace set to 0
10/10/2012	10:28:18 AM	Helium valve closed
10/10/2012	10:28:18 AM	H2 valve closed
10/10/2012	10:28:18 AM	BCl3 valve closed
10/10/2012	10:28:18 AM	PH3 valve closed
10/10/2012	10:28:18 AM	SiCl4 pre valve closed
10/10/2012	10:28:18 AM	SiCl4 post valve closed
10/10/2012	10:28:18 AM	Bypass valve closed
10/10/2012	10:28:18 AM	Bubbler valve closed
10/10/2012	10:28:18 AM	Main Vac valve opened
10/10/2012	10:28:18 AM	Helium MFC set to  0.000000
10/10/2012	10:28:18 AM	H2 MFC set to  0.000000
10/10/2012	10:28:18 AM	BCl3 MFC set to  0.000000
10/10/2012	10:28:18 AM	PH3 MFC set to  0.000000
10/10/2012	10:28:18 AM	SiCl4 MFC set to  0.000000
10/10/2012	10:28:18 AM	Bypass solenoid MFC set to  0.000000
10/10/2012	10:28:18 AM	Tube furnace set to 0
10/10/2012	10:28:19 AM	Run finished at 10:28 AM
10/10/2012	10:28:19 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
10/10/2012	10:28:30 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
10/10/2012	10:28:30 AM	Recipe started at 10:28 AM
10/10/2012	10:28:30 AM	Helium valve closed
10/10/2012	10:28:30 AM	H2 valve closed
10/10/2012	10:28:30 AM	BCl3 valve closed
10/10/2012	10:28:30 AM	PH3 valve closed
10/10/2012	10:28:30 AM	SiCl4 pre valve closed
10/10/2012	10:28:30 AM	SiCl4 post valve closed
10/10/2012	10:28:31 AM	Main Vac valve closed
10/10/2012	10:28:31 AM	Bypass valve closed
10/10/2012	10:28:31 AM	Bubbler valve closed
10/10/2012	10:28:31 AM	Helium MFC set to  0.000000
10/10/2012	10:28:31 AM	H2 MFC set to  0.000000
10/10/2012	10:28:31 AM	BCl3 MFC set to  0.000000
10/10/2012	10:28:31 AM	PH3 MFC set to  0.000000
10/10/2012	10:28:31 AM	SiCl4 MFC set to  0.000000
10/10/2012	10:28:31 AM	Bypass solenoid MFC set to  0.000000
10/10/2012	10:28:31 AM	Tube furnace set to 0
10/10/2012	10:28:33 AM	Run aborted at 10:28 AM
10/10/2012	10:28:33 AM	Helium valve closed
10/10/2012	10:28:33 AM	H2 valve closed
10/10/2012	10:28:33 AM	BCl3 valve closed
10/10/2012	10:28:33 AM	PH3 valve closed
10/10/2012	10:28:33 AM	SiCl4 pre valve closed
10/10/2012	10:28:33 AM	SiCl4 post valve closed
10/10/2012	10:28:33 AM	Bypass valve closed
10/10/2012	10:28:33 AM	Main Vac valve closed
10/10/2012	10:28:33 AM	Bubbler valve closed
10/10/2012	10:28:33 AM	Helium MFC set to  0.000000
10/10/2012	10:28:33 AM	H2 MFC set to  0.000000
10/10/2012	10:28:33 AM	BCl3 MFC set to  0.000000
10/10/2012	10:28:33 AM	PH3 MFC set to  0.000000
10/10/2012	10:28:33 AM	SiCl4 MFC set to  0.000000
10/10/2012	10:28:33 AM	Tube furnace set to 0
10/10/2012	10:28:33 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
10/10/2012	10:28:38 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
10/10/2012	10:28:39 AM	Recipe started at 10:28 AM
10/10/2012	10:28:39 AM	Helium valve closed
10/10/2012	10:28:39 AM	H2 valve closed
10/10/2012	10:28:39 AM	BCl3 valve closed
10/10/2012	10:28:39 AM	PH3 valve closed
10/10/2012	10:28:39 AM	SiCl4 pre valve closed
10/10/2012	10:28:39 AM	SiCl4 post valve closed
10/10/2012	10:28:39 AM	Main Vac valve closed
10/10/2012	10:28:39 AM	Bypass valve closed
10/10/2012	10:28:39 AM	Bubbler valve closed
10/10/2012	10:28:39 AM	Helium MFC set to  0.000000
10/10/2012	10:28:39 AM	H2 MFC set to  0.000000
10/10/2012	10:28:39 AM	BCl3 MFC set to  0.000000
10/10/2012	10:28:39 AM	PH3 MFC set to  0.000000
10/10/2012	10:28:39 AM	SiCl4 MFC set to  0.000000
10/10/2012	10:28:39 AM	Bypass solenoid MFC set to  0.000000
10/10/2012	10:28:39 AM	Tube furnace set to 0
10/10/2012	10:28:42 AM	H2 valve closed
10/10/2012	10:28:42 AM	BCl3 valve closed
10/10/2012	10:28:42 AM	PH3 valve closed
10/10/2012	10:28:42 AM	SiCl4 pre valve closed
10/10/2012	10:28:42 AM	SiCl4 post valve closed
10/10/2012	10:28:42 AM	Main Vac valve closed
10/10/2012	10:28:42 AM	Bypass valve closed
10/10/2012	10:28:42 AM	Bubbler valve closed
10/10/2012	10:28:42 AM	Helium valve opened
10/10/2012	10:28:42 AM	Helium MFC set to  500.000000
10/10/2012	10:28:42 AM	H2 MFC set to  0.000000
10/10/2012	10:28:42 AM	BCl3 MFC set to  0.000000
10/10/2012	10:28:42 AM	PH3 MFC set to  0.000000
10/10/2012	10:28:42 AM	SiCl4 MFC set to  0.000000
10/10/2012	10:28:42 AM	Bypass solenoid MFC set to  0.000000
10/10/2012	10:28:43 AM	Tube furnace set to 0
10/10/2012	10:28:44 AM	Run aborted at 10:28 AM
10/10/2012	10:28:44 AM	Helium valve closed
10/10/2012	10:28:44 AM	H2 valve closed
10/10/2012	10:28:44 AM	BCl3 valve closed
10/10/2012	10:28:44 AM	PH3 valve closed
10/10/2012	10:28:44 AM	SiCl4 pre valve closed
10/10/2012	10:28:44 AM	SiCl4 post valve closed
10/10/2012	10:28:44 AM	Bypass valve closed
10/10/2012	10:28:44 AM	Main Vac valve closed
10/10/2012	10:28:44 AM	Bubbler valve closed
10/10/2012	10:28:44 AM	Helium MFC set to  0.000000
10/10/2012	10:28:44 AM	H2 MFC set to  0.000000
10/10/2012	10:28:44 AM	BCl3 MFC set to  0.000000
10/10/2012	10:28:44 AM	PH3 MFC set to  0.000000
10/10/2012	10:28:44 AM	SiCl4 MFC set to  0.000000
10/10/2012	10:28:45 AM	Tube furnace set to 0
10/10/2012	10:28:45 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
10/10/2012	10:28:55 AM	Helium MFC set to  10.000000
10/10/2012	10:29:05 AM	Helium MFC set to  50.000000
10/10/2012	10:29:07 AM	Helium valve opened
10/10/2012	10:29:31 AM	Helium valve closed
10/10/2012	10:29:35 AM	Helium valve opened
10/10/2012	10:30:00 AM	Helium valve closed
10/10/2012	10:30:09 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
10/10/2012	10:30:10 AM	Recipe started at 10:30 AM
10/10/2012	10:30:10 AM	Helium valve closed
10/10/2012	10:30:10 AM	H2 valve closed
10/10/2012	10:30:10 AM	BCl3 valve closed
10/10/2012	10:30:10 AM	PH3 valve closed
10/10/2012	10:30:10 AM	SiCl4 pre valve closed
10/10/2012	10:30:10 AM	SiCl4 post valve closed
10/10/2012	10:30:10 AM	Main Vac valve closed
10/10/2012	10:30:10 AM	Bypass valve closed
10/10/2012	10:30:10 AM	Bubbler valve closed
10/10/2012	10:30:10 AM	Helium MFC set to  0.000000
10/10/2012	10:30:10 AM	H2 MFC set to  0.000000
10/10/2012	10:30:10 AM	BCl3 MFC set to  0.000000
10/10/2012	10:30:10 AM	PH3 MFC set to  0.000000
10/10/2012	10:30:10 AM	SiCl4 MFC set to  0.000000
10/10/2012	10:30:10 AM	Bypass solenoid MFC set to  0.000000
10/10/2012	10:30:10 AM	Tube furnace set to 0
10/10/2012	10:30:12 AM	H2 valve closed
10/10/2012	10:30:12 AM	BCl3 valve closed
10/10/2012	10:30:12 AM	PH3 valve closed
10/10/2012	10:30:12 AM	SiCl4 pre valve closed
10/10/2012	10:30:12 AM	SiCl4 post valve closed
10/10/2012	10:30:12 AM	Main Vac valve closed
10/10/2012	10:30:12 AM	Bypass valve closed
10/10/2012	10:30:12 AM	Bubbler valve closed
10/10/2012	10:30:12 AM	Helium valve opened
10/10/2012	10:30:12 AM	Helium MFC set to  500.000000
10/10/2012	10:30:12 AM	H2 MFC set to  0.000000
10/10/2012	10:30:12 AM	BCl3 MFC set to  0.000000
10/10/2012	10:30:12 AM	PH3 MFC set to  0.000000
10/10/2012	10:30:12 AM	SiCl4 MFC set to  0.000000
10/10/2012	10:30:12 AM	Bypass solenoid MFC set to  0.000000
10/10/2012	10:30:12 AM	Tube furnace set to 0
10/10/2012	10:31:19 AM	Helium valve closed
10/10/2012	10:31:19 AM	H2 valve closed
10/10/2012	10:31:19 AM	BCl3 valve closed
10/10/2012	10:31:19 AM	PH3 valve closed
10/10/2012	10:31:19 AM	SiCl4 pre valve closed
10/10/2012	10:31:19 AM	SiCl4 post valve closed
10/10/2012	10:31:19 AM	Main Vac valve closed
10/10/2012	10:31:19 AM	Bypass valve closed
10/10/2012	10:31:19 AM	Bubbler valve closed
10/10/2012	10:31:19 AM	Helium MFC set to  0.000000
10/10/2012	10:31:19 AM	H2 MFC set to  0.000000
10/10/2012	10:31:19 AM	BCl3 MFC set to  0.000000
10/10/2012	10:31:19 AM	PH3 MFC set to  0.000000
10/10/2012	10:31:19 AM	SiCl4 MFC set to  0.000000
10/10/2012	10:31:19 AM	Bypass solenoid MFC set to  0.000000
10/10/2012	10:31:20 AM	Tube furnace set to 0
10/10/2012	10:31:21 AM	Run finished at 10:31 AM
10/10/2012	10:31:21 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
10/10/2012	10:32:18 AM	Helium valve closed
10/10/2012	10:32:18 AM	H2 valve closed
10/10/2012	10:32:18 AM	BCl3 valve closed
10/10/2012	10:32:18 AM	PH3 valve closed
10/10/2012	10:32:18 AM	SiCl4 pre valve closed
10/10/2012	10:32:18 AM	SiCl4 post valve closed
10/10/2012	10:32:18 AM	Main Vac valve closed
10/10/2012	10:32:18 AM	Bypass valve closed
10/10/2012	10:32:18 AM	Bubbler valve closed
10/10/2012	10:32:19 AM	Helium MFC set to  0.000000
10/10/2012	10:32:19 AM	H2 MFC set to  0.000000
10/10/2012	10:32:19 AM	BCl3 MFC set to  0.000000
10/10/2012	10:32:19 AM	PH3 MFC set to  0.000000
10/10/2012	10:32:19 AM	SiCl4 MFC set to  0.000000
10/10/2012	10:32:19 AM	Bypass solenoid MFC set to  760.000000
10/10/2012	10:32:19 AM	Tube furnace set to 0
10/10/2012	10:49:58 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
10/10/2012	10:49:59 AM	Recipe started at 10:49 AM
10/10/2012	10:49:59 AM	Helium valve closed
10/10/2012	10:49:59 AM	H2 valve closed
10/10/2012	10:49:59 AM	BCl3 valve closed
10/10/2012	10:49:59 AM	PH3 valve closed
10/10/2012	10:49:59 AM	SiCl4 pre valve closed
10/10/2012	10:49:59 AM	SiCl4 post valve closed
10/10/2012	10:49:59 AM	Main Vac valve closed
10/10/2012	10:49:59 AM	Bubbler valve closed
10/10/2012	10:49:59 AM	Bypass valve opened
10/10/2012	10:49:59 AM	Helium MFC set to  0.000000
10/10/2012	10:49:59 AM	H2 MFC set to  0.000000
10/10/2012	10:49:59 AM	BCl3 MFC set to  0.000000
10/10/2012	10:49:59 AM	PH3 MFC set to  0.000000
10/10/2012	10:49:59 AM	SiCl4 MFC set to  0.000000
10/10/2012	10:49:59 AM	Bypass solenoid MFC set to  0.000000
10/10/2012	10:49:59 AM	Tube furnace set to 0
10/10/2012	10:51:57 AM	Helium valve closed
10/10/2012	10:51:57 AM	H2 valve closed
10/10/2012	10:51:57 AM	BCl3 valve closed
10/10/2012	10:51:57 AM	PH3 valve closed
10/10/2012	10:51:57 AM	SiCl4 pre valve closed
10/10/2012	10:51:57 AM	SiCl4 post valve closed
10/10/2012	10:51:57 AM	Main Vac valve closed
10/10/2012	10:51:57 AM	Bubbler valve closed
10/10/2012	10:51:57 AM	Bypass valve opened
10/10/2012	10:51:57 AM	Helium MFC set to  0.000000
10/10/2012	10:51:57 AM	H2 MFC set to  0.000000
10/10/2012	10:51:57 AM	BCl3 MFC set to  0.000000
10/10/2012	10:51:57 AM	PH3 MFC set to  0.000000
10/10/2012	10:51:57 AM	SiCl4 MFC set to  0.000000
10/10/2012	10:51:57 AM	Bypass solenoid MFC set to  0.000000
10/10/2012	10:51:57 AM	Tube furnace set to 0
10/10/2012	10:52:57 AM	Helium valve closed
10/10/2012	10:52:57 AM	H2 valve closed
10/10/2012	10:52:57 AM	BCl3 valve closed
10/10/2012	10:52:57 AM	PH3 valve closed
10/10/2012	10:52:57 AM	SiCl4 pre valve closed
10/10/2012	10:52:57 AM	SiCl4 post valve closed
10/10/2012	10:52:57 AM	Bypass valve closed
10/10/2012	10:52:57 AM	Bubbler valve closed
10/10/2012	10:52:57 AM	Main Vac valve opened
10/10/2012	10:52:57 AM	Helium MFC set to  0.000000
10/10/2012	10:52:57 AM	H2 MFC set to  0.000000
10/10/2012	10:52:57 AM	BCl3 MFC set to  0.000000
10/10/2012	10:52:57 AM	PH3 MFC set to  0.000000
10/10/2012	10:52:57 AM	SiCl4 MFC set to  0.000000
10/10/2012	10:52:57 AM	Bypass solenoid MFC set to  0.000000
10/10/2012	10:52:57 AM	Tube furnace set to 0
10/10/2012	10:52:58 AM	Run finished at 10:52 AM
10/10/2012	10:52:58 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
10/10/2012	11:07:15 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
10/10/2012	11:07:27 AM	Recipe started at 11:07 AM
10/10/2012	11:07:27 AM	Helium valve closed
10/10/2012	11:07:27 AM	H2 valve closed
10/10/2012	11:07:27 AM	BCl3 valve closed
10/10/2012	11:07:27 AM	PH3 valve closed
10/10/2012	11:07:27 AM	SiCl4 pre valve closed
10/10/2012	11:07:27 AM	SiCl4 post valve closed
10/10/2012	11:07:27 AM	Main Vac valve closed
10/10/2012	11:07:27 AM	Bubbler valve closed
10/10/2012	11:07:27 AM	Bypass valve opened
10/10/2012	11:07:27 AM	Helium MFC set to  0.000000
10/10/2012	11:07:27 AM	H2 MFC set to  0.000000
10/10/2012	11:07:27 AM	BCl3 MFC set to  0.000000
10/10/2012	11:07:27 AM	PH3 MFC set to  0.000000
10/10/2012	11:07:27 AM	SiCl4 MFC set to  0.000000
10/10/2012	11:07:27 AM	Bypass solenoid MFC set to  0.000000
10/10/2012	11:07:28 AM	Tube furnace set to 0
10/10/2012	11:07:28 AM	Helium valve closed
10/10/2012	11:07:28 AM	H2 valve closed
10/10/2012	11:07:28 AM	BCl3 valve closed
10/10/2012	11:07:28 AM	PH3 valve closed
10/10/2012	11:07:28 AM	SiCl4 pre valve closed
10/10/2012	11:07:28 AM	SiCl4 post valve closed
10/10/2012	11:07:28 AM	Main Vac valve closed
10/10/2012	11:07:28 AM	Bubbler valve closed
10/10/2012	11:07:28 AM	Bypass valve opened
10/10/2012	11:07:28 AM	Helium MFC set to  0.000000
10/10/2012	11:07:28 AM	H2 MFC set to  0.000000
10/10/2012	11:07:28 AM	BCl3 MFC set to  0.000000
10/10/2012	11:07:28 AM	PH3 MFC set to  0.000000
10/10/2012	11:07:28 AM	SiCl4 MFC set to  0.000000
10/10/2012	11:07:28 AM	Bypass solenoid MFC set to  0.000000
10/10/2012	11:07:28 AM	Tube furnace set to 0
10/10/2012	11:07:46 AM	Helium valve closed
10/10/2012	11:07:46 AM	H2 valve closed
10/10/2012	11:07:46 AM	BCl3 valve closed
10/10/2012	11:07:46 AM	PH3 valve closed
10/10/2012	11:07:46 AM	SiCl4 pre valve closed
10/10/2012	11:07:46 AM	SiCl4 post valve closed
10/10/2012	11:07:46 AM	Bypass valve closed
10/10/2012	11:07:46 AM	Bubbler valve closed
10/10/2012	11:07:46 AM	Main Vac valve opened
10/10/2012	11:07:46 AM	Helium MFC set to  0.000000
10/10/2012	11:07:46 AM	H2 MFC set to  0.000000
10/10/2012	11:07:46 AM	BCl3 MFC set to  0.000000
10/10/2012	11:07:46 AM	PH3 MFC set to  0.000000
10/10/2012	11:07:46 AM	SiCl4 MFC set to  0.000000
10/10/2012	11:07:46 AM	Bypass solenoid MFC set to  0.000000
10/10/2012	11:07:46 AM	Tube furnace set to 0
10/10/2012	11:07:47 AM	H2 valve closed
10/10/2012	11:07:47 AM	BCl3 valve closed
10/10/2012	11:07:47 AM	PH3 valve closed
10/10/2012	11:07:47 AM	SiCl4 pre valve closed
10/10/2012	11:07:47 AM	SiCl4 post valve closed
10/10/2012	11:07:47 AM	Bypass valve closed
10/10/2012	11:07:47 AM	Bubbler valve closed
10/10/2012	11:07:47 AM	Helium valve opened
10/10/2012	11:07:47 AM	Main Vac valve opened
10/10/2012	11:07:47 AM	Helium MFC set to  20.000000
10/10/2012	11:07:47 AM	H2 MFC set to  0.000000
10/10/2012	11:07:47 AM	BCl3 MFC set to  0.000000
10/10/2012	11:07:47 AM	PH3 MFC set to  0.000000
10/10/2012	11:07:47 AM	SiCl4 MFC set to  0.000000
10/10/2012	11:07:47 AM	Bypass solenoid MFC set to  0.000000
10/10/2012	11:07:47 AM	Tube furnace set to 0
10/10/2012	11:08:17 AM	Helium valve closed
10/10/2012	11:08:17 AM	H2 valve closed
10/10/2012	11:08:17 AM	BCl3 valve closed
10/10/2012	11:08:17 AM	PH3 valve closed
10/10/2012	11:08:17 AM	SiCl4 pre valve closed
10/10/2012	11:08:17 AM	SiCl4 post valve closed
10/10/2012	11:08:17 AM	Bypass valve closed
10/10/2012	11:08:17 AM	Bubbler valve closed
10/10/2012	11:08:17 AM	Main Vac valve opened
10/10/2012	11:08:17 AM	Helium MFC set to  0.000000
10/10/2012	11:08:17 AM	H2 MFC set to  0.000000
10/10/2012	11:08:17 AM	BCl3 MFC set to  0.000000
10/10/2012	11:08:17 AM	PH3 MFC set to  0.000000
10/10/2012	11:08:17 AM	SiCl4 MFC set to  0.000000
10/10/2012	11:08:17 AM	Bypass solenoid MFC set to  0.000000
10/10/2012	11:08:18 AM	Tube furnace set to 0
10/10/2012	11:08:48 AM	H2 valve closed
10/10/2012	11:08:48 AM	BCl3 valve closed
10/10/2012	11:08:48 AM	PH3 valve closed
10/10/2012	11:08:48 AM	SiCl4 pre valve closed
10/10/2012	11:08:48 AM	SiCl4 post valve closed
10/10/2012	11:08:48 AM	Bypass valve closed
10/10/2012	11:08:48 AM	Bubbler valve closed
10/10/2012	11:08:48 AM	Helium valve opened
10/10/2012	11:08:48 AM	Main Vac valve opened
10/10/2012	11:08:48 AM	Helium MFC set to  20.000000
10/10/2012	11:08:48 AM	H2 MFC set to  0.000000
10/10/2012	11:08:48 AM	BCl3 MFC set to  0.000000
10/10/2012	11:08:48 AM	PH3 MFC set to  0.000000
10/10/2012	11:08:48 AM	SiCl4 MFC set to  0.000000
10/10/2012	11:08:48 AM	Bypass solenoid MFC set to  0.000000
10/10/2012	11:08:48 AM	Tube furnace set to 0
10/10/2012	11:09:18 AM	Helium valve closed
10/10/2012	11:09:18 AM	H2 valve closed
10/10/2012	11:09:18 AM	BCl3 valve closed
10/10/2012	11:09:18 AM	PH3 valve closed
10/10/2012	11:09:18 AM	SiCl4 pre valve closed
10/10/2012	11:09:18 AM	SiCl4 post valve closed
10/10/2012	11:09:18 AM	Bypass valve closed
10/10/2012	11:09:18 AM	Bubbler valve closed
10/10/2012	11:09:18 AM	Main Vac valve opened
10/10/2012	11:09:18 AM	Helium MFC set to  0.000000
10/10/2012	11:09:18 AM	H2 MFC set to  0.000000
10/10/2012	11:09:18 AM	BCl3 MFC set to  0.000000
10/10/2012	11:09:18 AM	PH3 MFC set to  0.000000
10/10/2012	11:09:18 AM	SiCl4 MFC set to  0.000000
10/10/2012	11:09:18 AM	Bypass solenoid MFC set to  0.000000
10/10/2012	11:09:18 AM	Tube furnace set to 0
10/10/2012	11:09:48 AM	H2 valve closed
10/10/2012	11:09:48 AM	BCl3 valve closed
10/10/2012	11:09:48 AM	PH3 valve closed
10/10/2012	11:09:48 AM	SiCl4 pre valve closed
10/10/2012	11:09:48 AM	SiCl4 post valve closed
10/10/2012	11:09:48 AM	Bypass valve closed
10/10/2012	11:09:48 AM	Bubbler valve closed
10/10/2012	11:09:48 AM	Helium valve opened
10/10/2012	11:09:48 AM	Main Vac valve opened
10/10/2012	11:09:48 AM	Helium MFC set to  20.000000
10/10/2012	11:09:48 AM	H2 MFC set to  0.000000
10/10/2012	11:09:48 AM	BCl3 MFC set to  0.000000
10/10/2012	11:09:48 AM	PH3 MFC set to  0.000000
10/10/2012	11:09:48 AM	SiCl4 MFC set to  0.000000
10/10/2012	11:09:48 AM	Bypass solenoid MFC set to  0.000000
10/10/2012	11:09:48 AM	Tube furnace set to 0
10/10/2012	11:10:18 AM	Helium valve closed
10/10/2012	11:10:18 AM	H2 valve closed
10/10/2012	11:10:18 AM	BCl3 valve closed
10/10/2012	11:10:18 AM	PH3 valve closed
10/10/2012	11:10:18 AM	SiCl4 pre valve closed
10/10/2012	11:10:18 AM	SiCl4 post valve closed
10/10/2012	11:10:18 AM	Bypass valve closed
10/10/2012	11:10:18 AM	Bubbler valve closed
10/10/2012	11:10:18 AM	Main Vac valve opened
10/10/2012	11:10:18 AM	Helium MFC set to  0.000000
10/10/2012	11:10:18 AM	H2 MFC set to  0.000000
10/10/2012	11:10:18 AM	BCl3 MFC set to  0.000000
10/10/2012	11:10:18 AM	PH3 MFC set to  0.000000
10/10/2012	11:10:18 AM	SiCl4 MFC set to  0.000000
10/10/2012	11:10:18 AM	Bypass solenoid MFC set to  0.000000
10/10/2012	11:10:19 AM	Tube furnace set to 0
10/10/2012	11:10:49 AM	H2 valve closed
10/10/2012	11:10:49 AM	BCl3 valve closed
10/10/2012	11:10:49 AM	PH3 valve closed
10/10/2012	11:10:49 AM	SiCl4 pre valve closed
10/10/2012	11:10:49 AM	SiCl4 post valve closed
10/10/2012	11:10:49 AM	Bypass valve closed
10/10/2012	11:10:49 AM	Bubbler valve closed
10/10/2012	11:10:49 AM	Helium valve opened
10/10/2012	11:10:49 AM	Main Vac valve opened
10/10/2012	11:10:49 AM	Helium MFC set to  20.000000
10/10/2012	11:10:49 AM	H2 MFC set to  0.000000
10/10/2012	11:10:49 AM	BCl3 MFC set to  0.000000
10/10/2012	11:10:49 AM	PH3 MFC set to  0.000000
10/10/2012	11:10:49 AM	SiCl4 MFC set to  0.000000
10/10/2012	11:10:49 AM	Bypass solenoid MFC set to  0.000000
10/10/2012	11:10:49 AM	Tube furnace set to 0
10/10/2012	11:11:19 AM	Helium valve closed
10/10/2012	11:11:19 AM	H2 valve closed
10/10/2012	11:11:19 AM	BCl3 valve closed
10/10/2012	11:11:19 AM	PH3 valve closed
10/10/2012	11:11:19 AM	SiCl4 pre valve closed
10/10/2012	11:11:19 AM	SiCl4 post valve closed
10/10/2012	11:11:19 AM	Bypass valve closed
10/10/2012	11:11:19 AM	Bubbler valve closed
10/10/2012	11:11:19 AM	Main Vac valve opened
10/10/2012	11:11:19 AM	Helium MFC set to  0.000000
10/10/2012	11:11:19 AM	H2 MFC set to  0.000000
10/10/2012	11:11:19 AM	BCl3 MFC set to  0.000000
10/10/2012	11:11:19 AM	PH3 MFC set to  0.000000
10/10/2012	11:11:19 AM	SiCl4 MFC set to  0.000000
10/10/2012	11:11:19 AM	Bypass solenoid MFC set to  0.000000
10/10/2012	11:11:19 AM	Tube furnace set to 0
10/10/2012	11:11:49 AM	H2 valve closed
10/10/2012	11:11:49 AM	BCl3 valve closed
10/10/2012	11:11:49 AM	PH3 valve closed
10/10/2012	11:11:49 AM	SiCl4 pre valve closed
10/10/2012	11:11:49 AM	SiCl4 post valve closed
10/10/2012	11:11:49 AM	Bypass valve closed
10/10/2012	11:11:49 AM	Bubbler valve closed
10/10/2012	11:11:49 AM	Helium valve opened
10/10/2012	11:11:49 AM	Main Vac valve opened
10/10/2012	11:11:49 AM	Helium MFC set to  20.000000
10/10/2012	11:11:49 AM	H2 MFC set to  0.000000
10/10/2012	11:11:49 AM	BCl3 MFC set to  0.000000
10/10/2012	11:11:49 AM	PH3 MFC set to  0.000000
10/10/2012	11:11:49 AM	SiCl4 MFC set to  0.000000
10/10/2012	11:11:49 AM	Bypass solenoid MFC set to  0.000000
10/10/2012	11:11:49 AM	Tube furnace set to 0
10/10/2012	11:12:19 AM	Helium valve closed
10/10/2012	11:12:19 AM	H2 valve closed
10/10/2012	11:12:19 AM	BCl3 valve closed
10/10/2012	11:12:19 AM	PH3 valve closed
10/10/2012	11:12:19 AM	SiCl4 pre valve closed
10/10/2012	11:12:19 AM	SiCl4 post valve closed
10/10/2012	11:12:19 AM	Bypass valve closed
10/10/2012	11:12:19 AM	Bubbler valve closed
10/10/2012	11:12:19 AM	Main Vac valve opened
10/10/2012	11:12:19 AM	Helium MFC set to  0.000000
10/10/2012	11:12:19 AM	H2 MFC set to  0.000000
10/10/2012	11:12:19 AM	BCl3 MFC set to  0.000000
10/10/2012	11:12:19 AM	PH3 MFC set to  0.000000
10/10/2012	11:12:19 AM	SiCl4 MFC set to  0.000000
10/10/2012	11:12:19 AM	Bypass solenoid MFC set to  0.000000
10/10/2012	11:12:20 AM	Tube furnace set to 0
10/10/2012	11:12:50 AM	H2 valve closed
10/10/2012	11:12:50 AM	BCl3 valve closed
10/10/2012	11:12:50 AM	PH3 valve closed
10/10/2012	11:12:50 AM	SiCl4 pre valve closed
10/10/2012	11:12:50 AM	SiCl4 post valve closed
10/10/2012	11:12:50 AM	Bypass valve closed
10/10/2012	11:12:50 AM	Bubbler valve closed
10/10/2012	11:12:50 AM	Helium valve opened
10/10/2012	11:12:50 AM	Main Vac valve opened
10/10/2012	11:12:50 AM	Helium MFC set to  20.000000
10/10/2012	11:12:50 AM	H2 MFC set to  0.000000
10/10/2012	11:12:50 AM	BCl3 MFC set to  0.000000
10/10/2012	11:12:50 AM	PH3 MFC set to  0.000000
10/10/2012	11:12:50 AM	SiCl4 MFC set to  0.000000
10/10/2012	11:12:50 AM	Bypass solenoid MFC set to  0.000000
10/10/2012	11:12:50 AM	Tube furnace set to 0
10/10/2012	11:13:20 AM	Helium valve closed
10/10/2012	11:13:20 AM	H2 valve closed
10/10/2012	11:13:20 AM	BCl3 valve closed
10/10/2012	11:13:20 AM	PH3 valve closed
10/10/2012	11:13:20 AM	SiCl4 pre valve closed
10/10/2012	11:13:20 AM	SiCl4 post valve closed
10/10/2012	11:13:20 AM	Bypass valve closed
10/10/2012	11:13:20 AM	Bubbler valve closed
10/10/2012	11:13:20 AM	Main Vac valve opened
10/10/2012	11:13:20 AM	Helium MFC set to  0.000000
10/10/2012	11:13:20 AM	H2 MFC set to  0.000000
10/10/2012	11:13:20 AM	BCl3 MFC set to  0.000000
10/10/2012	11:13:20 AM	PH3 MFC set to  0.000000
10/10/2012	11:13:20 AM	SiCl4 MFC set to  0.000000
10/10/2012	11:13:20 AM	Bypass solenoid MFC set to  0.000000
10/10/2012	11:13:20 AM	Tube furnace set to 0
10/10/2012	11:13:50 AM	H2 valve closed
10/10/2012	11:13:50 AM	BCl3 valve closed
10/10/2012	11:13:50 AM	PH3 valve closed
10/10/2012	11:13:50 AM	SiCl4 pre valve closed
10/10/2012	11:13:50 AM	SiCl4 post valve closed
10/10/2012	11:13:50 AM	Bypass valve closed
10/10/2012	11:13:50 AM	Bubbler valve closed
10/10/2012	11:13:50 AM	Helium valve opened
10/10/2012	11:13:50 AM	Main Vac valve opened
10/10/2012	11:13:50 AM	Helium MFC set to  20.000000
10/10/2012	11:13:50 AM	H2 MFC set to  0.000000
10/10/2012	11:13:50 AM	BCl3 MFC set to  0.000000
10/10/2012	11:13:50 AM	PH3 MFC set to  0.000000
10/10/2012	11:13:50 AM	SiCl4 MFC set to  0.000000
10/10/2012	11:13:50 AM	Bypass solenoid MFC set to  0.000000
10/10/2012	11:13:50 AM	Tube furnace set to 0
10/10/2012	11:14:20 AM	Helium valve closed
10/10/2012	11:14:20 AM	H2 valve closed
10/10/2012	11:14:20 AM	BCl3 valve closed
10/10/2012	11:14:20 AM	PH3 valve closed
10/10/2012	11:14:20 AM	SiCl4 pre valve closed
10/10/2012	11:14:20 AM	SiCl4 post valve closed
10/10/2012	11:14:20 AM	Bypass valve closed
10/10/2012	11:14:20 AM	Bubbler valve closed
10/10/2012	11:14:20 AM	Main Vac valve opened
10/10/2012	11:14:20 AM	Helium MFC set to  0.000000
10/10/2012	11:14:20 AM	H2 MFC set to  0.000000
10/10/2012	11:14:20 AM	BCl3 MFC set to  0.000000
10/10/2012	11:14:20 AM	PH3 MFC set to  0.000000
10/10/2012	11:14:20 AM	SiCl4 MFC set to  0.000000
10/10/2012	11:14:20 AM	Bypass solenoid MFC set to  0.000000
10/10/2012	11:14:21 AM	Tube furnace set to 0
10/10/2012	11:14:51 AM	H2 valve closed
10/10/2012	11:14:51 AM	BCl3 valve closed
10/10/2012	11:14:51 AM	PH3 valve closed
10/10/2012	11:14:51 AM	SiCl4 pre valve closed
10/10/2012	11:14:51 AM	SiCl4 post valve closed
10/10/2012	11:14:51 AM	Bypass valve closed
10/10/2012	11:14:51 AM	Bubbler valve closed
10/10/2012	11:14:51 AM	Helium valve opened
10/10/2012	11:14:51 AM	Main Vac valve opened
10/10/2012	11:14:51 AM	Helium MFC set to  20.000000
10/10/2012	11:14:51 AM	H2 MFC set to  0.000000
10/10/2012	11:14:51 AM	BCl3 MFC set to  0.000000
10/10/2012	11:14:51 AM	PH3 MFC set to  0.000000
10/10/2012	11:14:51 AM	SiCl4 MFC set to  0.000000
10/10/2012	11:14:51 AM	Bypass solenoid MFC set to  0.000000
10/10/2012	11:14:51 AM	Tube furnace set to 0
10/10/2012	11:15:21 AM	Helium valve closed
10/10/2012	11:15:21 AM	H2 valve closed
10/10/2012	11:15:21 AM	BCl3 valve closed
10/10/2012	11:15:21 AM	PH3 valve closed
10/10/2012	11:15:21 AM	SiCl4 pre valve closed
10/10/2012	11:15:21 AM	SiCl4 post valve closed
10/10/2012	11:15:21 AM	Bypass valve closed
10/10/2012	11:15:21 AM	Bubbler valve closed
10/10/2012	11:15:21 AM	Main Vac valve opened
10/10/2012	11:15:21 AM	Helium MFC set to  0.000000
10/10/2012	11:15:21 AM	H2 MFC set to  0.000000
10/10/2012	11:15:21 AM	BCl3 MFC set to  0.000000
10/10/2012	11:15:21 AM	PH3 MFC set to  0.000000
10/10/2012	11:15:21 AM	SiCl4 MFC set to  0.000000
10/10/2012	11:15:21 AM	Bypass solenoid MFC set to  0.000000
10/10/2012	11:15:21 AM	Tube furnace set to 0
10/10/2012	11:15:51 AM	H2 valve closed
10/10/2012	11:15:51 AM	BCl3 valve closed
10/10/2012	11:15:51 AM	PH3 valve closed
10/10/2012	11:15:51 AM	SiCl4 pre valve closed
10/10/2012	11:15:51 AM	SiCl4 post valve closed
10/10/2012	11:15:51 AM	Bypass valve closed
10/10/2012	11:15:51 AM	Bubbler valve closed
10/10/2012	11:15:51 AM	Helium valve opened
10/10/2012	11:15:51 AM	Main Vac valve opened
10/10/2012	11:15:51 AM	Helium MFC set to  20.000000
10/10/2012	11:15:51 AM	H2 MFC set to  0.000000
10/10/2012	11:15:51 AM	BCl3 MFC set to  0.000000
10/10/2012	11:15:51 AM	PH3 MFC set to  0.000000
10/10/2012	11:15:51 AM	SiCl4 MFC set to  0.000000
10/10/2012	11:15:51 AM	Bypass solenoid MFC set to  0.000000
10/10/2012	11:15:51 AM	Tube furnace set to 0
10/10/2012	11:16:21 AM	Helium valve closed
10/10/2012	11:16:21 AM	H2 valve closed
10/10/2012	11:16:21 AM	BCl3 valve closed
10/10/2012	11:16:21 AM	PH3 valve closed
10/10/2012	11:16:21 AM	SiCl4 pre valve closed
10/10/2012	11:16:21 AM	SiCl4 post valve closed
10/10/2012	11:16:21 AM	Bypass valve closed
10/10/2012	11:16:21 AM	Bubbler valve closed
10/10/2012	11:16:21 AM	Main Vac valve opened
10/10/2012	11:16:21 AM	Helium MFC set to  0.000000
10/10/2012	11:16:21 AM	H2 MFC set to  0.000000
10/10/2012	11:16:21 AM	BCl3 MFC set to  0.000000
10/10/2012	11:16:21 AM	PH3 MFC set to  0.000000
10/10/2012	11:16:21 AM	SiCl4 MFC set to  0.000000
10/10/2012	11:16:21 AM	Bypass solenoid MFC set to  0.000000
10/10/2012	11:16:22 AM	Tube furnace set to 0
10/10/2012	11:16:52 AM	H2 valve closed
10/10/2012	11:16:52 AM	BCl3 valve closed
10/10/2012	11:16:52 AM	PH3 valve closed
10/10/2012	11:16:52 AM	SiCl4 pre valve closed
10/10/2012	11:16:52 AM	SiCl4 post valve closed
10/10/2012	11:16:52 AM	Bypass valve closed
10/10/2012	11:16:52 AM	Bubbler valve closed
10/10/2012	11:16:52 AM	Helium valve opened
10/10/2012	11:16:52 AM	Main Vac valve opened
10/10/2012	11:16:52 AM	Helium MFC set to  20.000000
10/10/2012	11:16:52 AM	H2 MFC set to  0.000000
10/10/2012	11:16:52 AM	BCl3 MFC set to  0.000000
10/10/2012	11:16:52 AM	PH3 MFC set to  0.000000
10/10/2012	11:16:52 AM	SiCl4 MFC set to  0.000000
10/10/2012	11:16:52 AM	Bypass solenoid MFC set to  0.000000
10/10/2012	11:16:52 AM	Tube furnace set to 0
10/10/2012	11:17:22 AM	Helium valve closed
10/10/2012	11:17:22 AM	H2 valve closed
10/10/2012	11:17:22 AM	BCl3 valve closed
10/10/2012	11:17:22 AM	PH3 valve closed
10/10/2012	11:17:22 AM	SiCl4 pre valve closed
10/10/2012	11:17:22 AM	SiCl4 post valve closed
10/10/2012	11:17:22 AM	Bypass valve closed
10/10/2012	11:17:22 AM	Bubbler valve closed
10/10/2012	11:17:22 AM	Main Vac valve opened
10/10/2012	11:17:22 AM	Helium MFC set to  0.000000
10/10/2012	11:17:22 AM	H2 MFC set to  0.000000
10/10/2012	11:17:22 AM	BCl3 MFC set to  0.000000
10/10/2012	11:17:22 AM	PH3 MFC set to  0.000000
10/10/2012	11:17:22 AM	SiCl4 MFC set to  0.000000
10/10/2012	11:17:22 AM	Bypass solenoid MFC set to  0.000000
10/10/2012	11:17:22 AM	Tube furnace set to 0
10/10/2012	11:17:23 AM	Run finished at 11:17 AM
10/10/2012	11:17:23 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
10/10/2012	11:20:40 AM	Recipe started at 11:20 AM
10/10/2012	11:20:40 AM	Helium valve closed
10/10/2012	11:20:40 AM	H2 valve closed
10/10/2012	11:20:40 AM	BCl3 valve closed
10/10/2012	11:20:40 AM	PH3 valve closed
10/10/2012	11:20:40 AM	SiCl4 pre valve closed
10/10/2012	11:20:40 AM	SiCl4 post valve closed
10/10/2012	11:20:40 AM	Main Vac valve closed
10/10/2012	11:20:40 AM	Bypass valve closed
10/10/2012	11:20:40 AM	Bubbler valve closed
10/10/2012	11:20:40 AM	Helium MFC set to  0.000000
10/10/2012	11:20:40 AM	H2 MFC set to  0.000000
10/10/2012	11:20:40 AM	BCl3 MFC set to  0.000000
10/10/2012	11:20:40 AM	PH3 MFC set to  0.000000
10/10/2012	11:20:40 AM	SiCl4 MFC set to  0.000000
10/10/2012	11:20:40 AM	Bypass solenoid MFC set to  0.000000
10/10/2012	11:20:40 AM	Tube furnace set to 0
10/10/2012	11:20:43 AM	Helium valve closed
10/10/2012	11:20:43 AM	BCl3 valve closed
10/10/2012	11:20:43 AM	PH3 valve closed
10/10/2012	11:20:43 AM	SiCl4 pre valve closed
10/10/2012	11:20:43 AM	SiCl4 post valve closed
10/10/2012	11:20:43 AM	Main Vac valve closed
10/10/2012	11:20:43 AM	Bypass valve closed
10/10/2012	11:20:43 AM	Bubbler valve closed
10/10/2012	11:20:43 AM	H2 valve opened
10/10/2012	11:20:43 AM	Helium MFC set to  0.000000
10/10/2012	11:20:43 AM	H2 MFC set to  500.000000
10/10/2012	11:20:43 AM	BCl3 MFC set to  0.000000
10/10/2012	11:20:43 AM	PH3 MFC set to  0.000000
10/10/2012	11:20:43 AM	SiCl4 MFC set to  0.000000
10/10/2012	11:20:43 AM	Bypass solenoid MFC set to  0.000000
10/10/2012	11:20:43 AM	Tube furnace set to 0
10/10/2012	11:22:01 AM	Helium valve closed
10/10/2012	11:22:01 AM	BCl3 valve closed
10/10/2012	11:22:01 AM	PH3 valve closed
10/10/2012	11:22:01 AM	SiCl4 pre valve closed
10/10/2012	11:22:01 AM	SiCl4 post valve closed
10/10/2012	11:22:01 AM	Main Vac valve closed
10/10/2012	11:22:01 AM	Bypass valve closed
10/10/2012	11:22:01 AM	H2 valve opened
10/10/2012	11:22:01 AM	Bubbler valve opened
10/10/2012	11:22:01 AM	Helium MFC set to  0.000000
10/10/2012	11:22:01 AM	H2 MFC set to  500.000000
10/10/2012	11:22:01 AM	BCl3 MFC set to  0.000000
10/10/2012	11:22:01 AM	PH3 MFC set to  0.000000
10/10/2012	11:22:01 AM	SiCl4 MFC set to  0.000000
10/10/2012	11:22:01 AM	Bypass solenoid MFC set to  0.000000
10/10/2012	11:22:01 AM	Tube furnace set to 0
10/10/2012	11:22:02 AM	Helium valve closed
10/10/2012	11:22:02 AM	BCl3 valve closed
10/10/2012	11:22:02 AM	PH3 valve closed
10/10/2012	11:22:02 AM	SiCl4 pre valve closed
10/10/2012	11:22:02 AM	SiCl4 post valve closed
10/10/2012	11:22:02 AM	Main Vac valve closed
10/10/2012	11:22:02 AM	Bypass valve closed
10/10/2012	11:22:02 AM	H2 valve opened
10/10/2012	11:22:02 AM	Bubbler valve opened
10/10/2012	11:22:02 AM	Helium MFC set to  0.000000
10/10/2012	11:22:02 AM	H2 MFC set to  500.000000
10/10/2012	11:22:02 AM	BCl3 MFC set to  0.000000
10/10/2012	11:22:02 AM	PH3 MFC set to  0.000000
10/10/2012	11:22:02 AM	SiCl4 MFC set to  0.000000
10/10/2012	11:22:02 AM	Bypass solenoid MFC set to  0.000000
10/10/2012	11:22:02 AM	Tube furnace set to 1000
10/10/2012	11:42:02 AM	Helium valve closed
10/10/2012	11:42:02 AM	PH3 valve closed
10/10/2012	11:42:02 AM	Main Vac valve closed
10/10/2012	11:42:02 AM	Bypass valve closed
10/10/2012	11:42:02 AM	H2 valve opened
10/10/2012	11:42:02 AM	BCl3 valve opened
10/10/2012	11:42:02 AM	SiCl4 pre valve opened
10/10/2012	11:42:02 AM	SiCl4 post valve opened
10/10/2012	11:42:02 AM	Bubbler valve opened
10/10/2012	11:42:02 AM	Helium MFC set to  0.000000
10/10/2012	11:42:02 AM	H2 MFC set to  500.000000
10/10/2012	11:42:02 AM	BCl3 MFC set to  1.000000
10/10/2012	11:42:02 AM	PH3 MFC set to  0.000000
10/10/2012	11:42:02 AM	SiCl4 MFC set to  50.000000
10/10/2012	11:42:02 AM	Bypass solenoid MFC set to  0.000000
10/10/2012	11:42:02 AM	Tube furnace set to 1000
10/10/2012	12:02:02 PM	Helium valve closed
10/10/2012	12:02:02 PM	BCl3 valve closed
10/10/2012	12:02:02 PM	PH3 valve closed
10/10/2012	12:02:02 PM	SiCl4 pre valve closed
10/10/2012	12:02:02 PM	SiCl4 post valve closed
10/10/2012	12:02:02 PM	Main Vac valve closed
10/10/2012	12:02:02 PM	Bypass valve closed
10/10/2012	12:02:02 PM	H2 valve opened
10/10/2012	12:02:02 PM	Bubbler valve opened
10/10/2012	12:02:02 PM	Helium MFC set to  0.000000
10/10/2012	12:02:02 PM	H2 MFC set to  500.000000
10/10/2012	12:02:02 PM	BCl3 MFC set to  0.000000
10/10/2012	12:02:02 PM	PH3 MFC set to  0.000000
10/10/2012	12:02:02 PM	SiCl4 MFC set to  0.000000
10/10/2012	12:02:02 PM	Bypass solenoid MFC set to  0.000000
10/10/2012	12:02:02 PM	Tube furnace set to 750
10/10/2012	12:07:02 PM	H2 valve closed
10/10/2012	12:07:02 PM	BCl3 valve closed
10/10/2012	12:07:02 PM	PH3 valve closed
10/10/2012	12:07:03 PM	SiCl4 pre valve closed
10/10/2012	12:07:03 PM	SiCl4 post valve closed
10/10/2012	12:07:03 PM	Main Vac valve closed
10/10/2012	12:07:03 PM	Bypass valve closed
10/10/2012	12:07:03 PM	Helium valve opened
10/10/2012	12:07:03 PM	Bubbler valve opened
10/10/2012	12:07:03 PM	Helium MFC set to  500.000000
10/10/2012	12:07:03 PM	H2 MFC set to  0.000000
10/10/2012	12:07:03 PM	BCl3 MFC set to  0.000000
10/10/2012	12:07:03 PM	PH3 MFC set to  0.000000
10/10/2012	12:07:03 PM	SiCl4 MFC set to  0.000000
10/10/2012	12:07:03 PM	Bypass solenoid MFC set to  0.000000
10/10/2012	12:07:03 PM	Tube furnace set to 0
10/10/2012	12:27:03 PM	Helium valve closed
10/10/2012	12:27:03 PM	H2 valve closed
10/10/2012	12:27:03 PM	BCl3 valve closed
10/10/2012	12:27:03 PM	PH3 valve closed
10/10/2012	12:27:03 PM	SiCl4 pre valve closed
10/10/2012	12:27:03 PM	SiCl4 post valve closed
10/10/2012	12:27:03 PM	Main Vac valve closed
10/10/2012	12:27:03 PM	Bypass valve closed
10/10/2012	12:27:03 PM	Bubbler valve closed
10/10/2012	12:27:03 PM	Helium MFC set to  0.000000
10/10/2012	12:27:03 PM	H2 MFC set to  0.000000
10/10/2012	12:27:03 PM	BCl3 MFC set to  0.000000
10/10/2012	12:27:03 PM	PH3 MFC set to  0.000000
10/10/2012	12:27:03 PM	SiCl4 MFC set to  0.000000
10/10/2012	12:27:03 PM	Bypass solenoid MFC set to  0.000000
10/10/2012	12:27:03 PM	Tube furnace set to 0
10/10/2012	12:27:04 PM	Run finished at 12:27 PM
10/10/2012	5:00:18 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
10/10/2012	5:00:19 PM	Recipe started at 5:00 PM
10/10/2012	5:00:19 PM	Helium valve closed
10/10/2012	5:00:19 PM	H2 valve closed
10/10/2012	5:00:19 PM	BCl3 valve closed
10/10/2012	5:00:19 PM	PH3 valve closed
10/10/2012	5:00:19 PM	SiCl4 pre valve closed
10/10/2012	5:00:19 PM	SiCl4 post valve closed
10/10/2012	5:00:19 PM	Main Vac valve closed
10/10/2012	5:00:19 PM	Bypass valve closed
10/10/2012	5:00:19 PM	Bubbler valve closed
10/10/2012	5:00:19 PM	Helium MFC set to  0.000000
10/10/2012	5:00:19 PM	H2 MFC set to  0.000000
10/10/2012	5:00:19 PM	BCl3 MFC set to  0.000000
10/10/2012	5:00:19 PM	PH3 MFC set to  0.000000
10/10/2012	5:00:19 PM	SiCl4 MFC set to  0.000000
10/10/2012	5:00:19 PM	Bypass solenoid MFC set to  0.000000
10/10/2012	5:00:19 PM	Tube furnace set to 0
10/10/2012	5:00:22 PM	H2 valve closed
10/10/2012	5:00:22 PM	BCl3 valve closed
10/10/2012	5:00:22 PM	PH3 valve closed
10/10/2012	5:00:22 PM	SiCl4 pre valve closed
10/10/2012	5:00:22 PM	SiCl4 post valve closed
10/10/2012	5:00:22 PM	Main Vac valve closed
10/10/2012	5:00:22 PM	Bypass valve closed
10/10/2012	5:00:22 PM	Bubbler valve closed
10/10/2012	5:00:22 PM	Helium valve opened
10/10/2012	5:00:22 PM	Helium MFC set to  500.000000
10/10/2012	5:00:22 PM	H2 MFC set to  0.000000
10/10/2012	5:00:22 PM	BCl3 MFC set to  0.000000
10/10/2012	5:00:22 PM	PH3 MFC set to  0.000000
10/10/2012	5:00:22 PM	SiCl4 MFC set to  0.000000
10/10/2012	5:00:22 PM	Bypass solenoid MFC set to  0.000000
10/10/2012	5:00:22 PM	Tube furnace set to 0
10/10/2012	5:00:30 PM	Helium valve closed
10/10/2012	5:00:30 PM	H2 valve closed
10/10/2012	5:00:30 PM	BCl3 valve closed
10/10/2012	5:00:30 PM	PH3 valve closed
10/10/2012	5:00:30 PM	SiCl4 pre valve closed
10/10/2012	5:00:30 PM	SiCl4 post valve closed
10/10/2012	5:00:30 PM	Main Vac valve closed
10/10/2012	5:00:30 PM	Bypass valve closed
10/10/2012	5:00:30 PM	Bubbler valve closed
10/10/2012	5:00:30 PM	Helium MFC set to  0.000000
10/10/2012	5:00:30 PM	H2 MFC set to  0.000000
10/10/2012	5:00:30 PM	BCl3 MFC set to  0.000000
10/10/2012	5:00:30 PM	PH3 MFC set to  0.000000
10/10/2012	5:00:30 PM	SiCl4 MFC set to  0.000000
10/10/2012	5:00:30 PM	Bypass solenoid MFC set to  0.000000
10/10/2012	5:00:30 PM	Tube furnace set to 0
10/10/2012	5:00:31 PM	Run finished at 5:00 PM
10/10/2012	5:00:31 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
10/10/2012	5:03:45 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
10/10/2012	5:03:46 PM	Recipe started at 5:03 PM
10/10/2012	5:03:46 PM	Helium valve closed
10/10/2012	5:03:46 PM	H2 valve closed
10/10/2012	5:03:46 PM	BCl3 valve closed
10/10/2012	5:03:46 PM	PH3 valve closed
10/10/2012	5:03:46 PM	SiCl4 pre valve closed
10/10/2012	5:03:46 PM	SiCl4 post valve closed
10/10/2012	5:03:46 PM	Main Vac valve closed
10/10/2012	5:03:46 PM	Bubbler valve closed
10/10/2012	5:03:46 PM	Bypass valve opened
10/10/2012	5:03:46 PM	Helium MFC set to  0.000000
10/10/2012	5:03:46 PM	H2 MFC set to  0.000000
10/10/2012	5:03:46 PM	BCl3 MFC set to  0.000000
10/10/2012	5:03:46 PM	PH3 MFC set to  0.000000
10/10/2012	5:03:46 PM	SiCl4 MFC set to  0.000000
10/10/2012	5:03:46 PM	Bypass solenoid MFC set to  0.000000
10/10/2012	5:03:46 PM	Tube furnace set to 0
10/10/2012	5:05:38 PM	Helium valve closed
10/10/2012	5:05:38 PM	H2 valve closed
10/10/2012	5:05:38 PM	BCl3 valve closed
10/10/2012	5:05:38 PM	PH3 valve closed
10/10/2012	5:05:38 PM	SiCl4 pre valve closed
10/10/2012	5:05:38 PM	SiCl4 post valve closed
10/10/2012	5:05:38 PM	Main Vac valve closed
10/10/2012	5:05:38 PM	Bubbler valve closed
10/10/2012	5:05:38 PM	Bypass valve opened
10/10/2012	5:05:38 PM	Helium MFC set to  0.000000
10/10/2012	5:05:38 PM	H2 MFC set to  0.000000
10/10/2012	5:05:38 PM	BCl3 MFC set to  0.000000
10/10/2012	5:05:38 PM	PH3 MFC set to  0.000000
10/10/2012	5:05:38 PM	SiCl4 MFC set to  0.000000
10/10/2012	5:05:38 PM	Bypass solenoid MFC set to  0.000000
10/10/2012	5:05:38 PM	Tube furnace set to 0
10/10/2012	5:06:38 PM	Helium valve closed
10/10/2012	5:06:38 PM	H2 valve closed
10/10/2012	5:06:38 PM	BCl3 valve closed
10/10/2012	5:06:38 PM	PH3 valve closed
10/10/2012	5:06:38 PM	SiCl4 pre valve closed
10/10/2012	5:06:38 PM	SiCl4 post valve closed
10/10/2012	5:06:38 PM	Bypass valve closed
10/10/2012	5:06:38 PM	Bubbler valve closed
10/10/2012	5:06:38 PM	Main Vac valve opened
10/10/2012	5:06:38 PM	Helium MFC set to  0.000000
10/10/2012	5:06:38 PM	H2 MFC set to  0.000000
10/10/2012	5:06:38 PM	BCl3 MFC set to  0.000000
10/10/2012	5:06:38 PM	PH3 MFC set to  0.000000
10/10/2012	5:06:38 PM	SiCl4 MFC set to  0.000000
10/10/2012	5:06:38 PM	Bypass solenoid MFC set to  0.000000
10/10/2012	5:06:38 PM	Tube furnace set to 0
10/10/2012	5:06:39 PM	Run finished at 5:06 PM
10/10/2012	5:06:39 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
